Alignment signal detecting device

Details Alignment signal detecting device Alignment signal detecting device

1989-03-06

1990-06-26

Mottola, Steven

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

250225, 356401, G01N 2186, G01B 1100

Patent

active

049374591

ABSTRACT:
An alignment signal detecting device including a polarization-plane rotating element and a polarization beam splitter, co-operative to selectively define different optical paths for the same alignment beam, optical elements disposed on respective optical paths and effective to detect an alignment signal from an alignment mark with an improved detection accuracy, and a control unit for controlling the polarization plane rotating element to change the plane of polarization so as to assure detection of the alignment signal from the alignment mark in a most suitable manner.

REFERENCES:
patent: 4563094 (1986-01-01), Yamada
patent: 4579453 (1986-04-01), Makita
patent: 4611122 (1986-09-01), Nakano et al.
patent: 4641035 (1987-02-01), Suzuki et al.
patent: 4645924 (1987-02-01), Suzuki et al.
patent: 4659228 (1987-04-01), Totsuka et al.
patent: 4669883 (1987-06-01), Ina et al.

Affiliated with

Also associated with

Rating

Alignment signal detecting device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment signal detecting device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment signal detecting device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1127201