Alignment sensor

Details Alignment sensor Alignment sensor

2005-09-27

2005-09-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C356S401000

Reexamination Certificate

active

06950194

ABSTRACT:
The present invention relates in general to detection of an alignment mark on a workpiece. More particularly, interferometry is applied to detect alignment signals from the surface of a workpiece such as a wafer or reticle. Other aspects of the present invention are reflected in the detailed description, figures and claims.

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Daniel Malacara “Optical Shop Testing”, 1992, pp. 501-510 and 700-707, Second Edition, John Wiley & Sons, Inc.

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