Alignment routine for optically based tools

Details Alignment routine for optically based tools Alignment routine for optically based tools

2008-03-10

2009-06-09

Toatley, Jr., Gregory J (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C382S151000, C355S077000, C430S030000

Reexamination Certificate

active

07545497

ABSTRACT:
A method is provided for using a point of interest as a starting point where an alignment is automatically selected by recognition software for a patterned substrate. The method includes disposing the patterned substrate on a stage of an exposure system, the exposure system having an alignment routine including; locating a first point of interest on the patterned substrate; scanning a first area proximate the first point of interest for a first unique feature; defining a periodicity for the patterned substrate; locating a second point of interest based on the periodicity; scanning a second area proximate the second point of interest for a second unique feature corresponding to the first unique feature; gathering alignment data from at least scanning the first and second areas; and determining substrate position relative to the exposure system from alignment data of at least the first and second scanned areas.

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