Alignment process using serial detection of repetitively pattern

Details Alignment process using serial detection of repetitively pattern Alignment process using serial detection of repetitively pattern

1980-05-13

1982-04-27

Dixon, Harold A.

Radiant energy

Means to align or position an object relative to a source or...

250398, 2504921, 2504922, A61K 2702, G01M 2100

Patent

active

043272924

ABSTRACT:
The specification discloses a process for accurately aligning a chosen member with a focused beam of radiation or for aligning two chosen members with each other. A set of alignment marks having a predetermined spatial pattern is first provided on the surface of each member. Next, a detection signal is generated from the set of alignment marks, comprising a serial electronic signal as a function of time and containing serial information corresponding to the relative position of each mark in the set of alignment marks. Then, the detection signal is electronically processed to generate an alignment signal with a high signal-to-noise ratio. Next, the alignment signal is compared to a reference signal signifying a predetermined criterion of alignment, to generate an error signal which is indicative of the extent of misalignment. Finally, lateral movement of one chosen member is produced in response to the error signal until accurate alignment of the chosen member with the focused beam of radiation or of the two chosen members with each other is achieved.

REFERENCES:
patent: 3519788 (1970-07-01), Hatzakis
patent: 3849659 (1974-11-01), O'Keeffe
patent: 3875416 (1975-04-01), Spicer
patent: 4109029 (1972-08-01), Ozdemir
patent: 4125418 (1978-11-01), Vinton
patent: 4200395 (1980-04-01), Smith et al.
patent: 4203064 (1980-05-01), Suzuki et al.
patent: 4213117 (1980-07-01), Kembo et al.
patent: 4219719 (1980-08-01), Frosien
patent: 4253112 (1981-02-01), Doemens
"Optimal Patterns for Alignment" by Makaous Applied Optics, vol. 13, No. 3, Mar. 74, pp. 659-664.

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