Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2005-11-30
2008-11-04
Vo, Peter DungBa (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S825000, C029S832000, C029S834000, C029S835000
Reexamination Certificate
active
07444733
ABSTRACT:
Alignment precision enhancement of electronic component process on flexible substrate device and method thereof the same is proposed. The process step of a flexible substrate is put on a substrate holder, wherein the flexible substrate is fixed by a polymer tape. A plural of alignment marks is making for lithography process. An unstressed cut is separated the flexible substrate and substrate holder when the electronic component is made.
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Cheng Hsiang-Yuan
Ho Jia-Chong
Hu Tarng-Shiang
Angwin David P
Industrial Technology Research Institute
Rabin & Berdo P.C.
Vo Peter DungBa
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