Image analysis – Applications – Manufacturing or product inspection
Reexamination Certificate
2011-05-17
2011-05-17
Desire, Gregory M (Department: 2624)
Image analysis
Applications
Manufacturing or product inspection
C250S491100, C250S559300, C356S237600, C356S399000
Reexamination Certificate
active
07945087
ABSTRACT:
A method for micromachining a material, including configuring an optical system to provide illumination of an illumination wavelength to a site via a given element of the optical system, the illumination generating returning radiation from the site. The method further includes configuring the optical system to receive the returning radiation via the given element, and to form an image of the site therefrom, calculating an actual position of a location at the site from the image and outputting a signal indicative of the actual position of the location, generating a beam of micromachining radiation having a micromachining wavelength different from the illumination wavelength, positioning the beam to form an aligned beam with respect to the location in response to the signal, and conveying the aligned beam to the location via at least the given element of the optical system so as to perform a micromachining operation at the location.
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Greenberg Boris
Hanina Golan
Kotler Zvi
Lipman Eliezer
Zenou Michael
Desire Gregory M
Orbotech Ltd.
Sughrue & Mion, PLLC
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