Radiation imagery chemistry: process – composition – or product th – Registration or layout process other than color proofing
Reexamination Certificate
2005-07-12
2005-07-12
Young, Christopher G. (Department: 1756)
Radiation imagery chemistry: process, composition, or product th
Registration or layout process other than color proofing
C430S302000, C430S322000, C264S494000, C264S496000
Reexamination Certificate
active
06916584
ABSTRACT:
Described are methods for patterning a substrate by imprint lithography. Imprint lithography is a process in which a liquid is dispensed onto a substrate. A template is brought into contact with the liquid and the liquid is cured. The cured liquid includes an imprint of any patterns formed in the template. Alignment of the template with the substrate is performed prior to curing the liquid. Alignment of the template with the substrate includes rotational alignment of the template with respect to the substrate.
REFERENCES:
patent: 3783520 (1974-01-01), King
patent: 3807027 (1974-04-01), Heisler
patent: 3807029 (1974-04-01), Troeger
patent: 3811665 (1974-05-01), Seelig
patent: 4062600 (1977-12-01), Wyse
patent: 4070116 (1978-01-01), Frosch et al.
patent: 4098001 (1978-07-01), Watson
patent: 4119688 (1978-10-01), Hiraoka
patent: 4155169 (1979-05-01), Drake et al.
patent: 4201800 (1980-05-01), Alcorn et al.
patent: 4202107 (1980-05-01), Watson
patent: 4267212 (1981-05-01), Sakawaki
patent: 4326805 (1982-04-01), Feldman et al.
patent: 4337579 (1982-07-01), De Fazio
patent: 4355469 (1982-10-01), Nevins et al.
patent: 4414750 (1983-11-01), De Fazio
patent: 4426247 (1984-01-01), Tamamura et al.
patent: 4440804 (1984-04-01), Milgram
patent: 4451507 (1984-05-01), Beltz et al.
patent: 4507331 (1985-03-01), Hiraoka
patent: 4544572 (1985-10-01), Sandvig et al.
patent: 4552832 (1985-11-01), Blume et al.
patent: 4552833 (1985-11-01), Ito et al.
patent: 4600309 (1986-07-01), Fay
patent: 4610442 (1986-09-01), Oku et al.
patent: 4657845 (1987-04-01), Frechet et al.
patent: 4692205 (1987-09-01), Sachdev et al.
patent: 4694703 (1987-09-01), Routson
patent: 4707218 (1987-11-01), Giammarco et al.
patent: 4724222 (1988-02-01), Feldman
patent: 4731155 (1988-03-01), Napoli et al.
patent: 4737425 (1988-04-01), Lin et al.
patent: 4763886 (1988-08-01), Takei
patent: 4772878 (1988-09-01), Kane
patent: 4808511 (1989-02-01), Holmes
patent: 4826943 (1989-05-01), Ito et al.
patent: 4846931 (1989-07-01), Gmitter et al.
patent: 4848911 (1989-07-01), Uchida et al.
patent: 4857477 (1989-08-01), Kanamori
patent: 4883561 (1989-11-01), Gmitter et al.
patent: 4891303 (1990-01-01), Garza et al.
patent: 4908298 (1990-03-01), Hefferon et al.
patent: 4909151 (1990-03-01), Fukui et al.
patent: 4919748 (1990-04-01), Bredbenner et al.
patent: 4921778 (1990-05-01), Thackeray et al.
patent: 4929083 (1990-05-01), Brunner
patent: 4931351 (1990-06-01), McColgin et al.
patent: 4959252 (1990-09-01), Bonnebat et al.
patent: 4964945 (1990-10-01), Calhoun
patent: 4976818 (1990-12-01), Hashimoto et al.
patent: 4980316 (1990-12-01), Huebner
patent: 4999280 (1991-03-01), Hiraoka
patent: 5053318 (1991-10-01), Gulla et al.
patent: 5071694 (1991-12-01), Uekita et al.
patent: 5072126 (1991-12-01), Progler
patent: 5073230 (1991-12-01), Maracas et al.
patent: 5074667 (1991-12-01), Miyatake
patent: 5108875 (1992-04-01), Thackeray et al.
patent: 5110514 (1992-05-01), Soane
patent: 5126006 (1992-06-01), Cronin et al.
patent: 5148036 (1992-09-01), Matsugu et al.
patent: 5148037 (1992-09-01), Suda et al.
patent: 5151754 (1992-09-01), Ishibashi et al.
patent: 5169494 (1992-12-01), Hashimoto et al.
patent: 5173393 (1992-12-01), Sezi et al.
patent: 5179863 (1993-01-01), Uchida et al.
patent: 5198326 (1993-03-01), Hashimoto et al.
patent: 5204739 (1993-04-01), Domenicali
patent: 5206983 (1993-05-01), Guckel et al.
patent: 5212147 (1993-05-01), Sheats
patent: 5218193 (1993-06-01), Miyatake
patent: 5234793 (1993-08-01), Sebald et al.
patent: 5240550 (1993-08-01), Boehnke et al.
patent: 5240878 (1993-08-01), Fitzsimmons et al.
patent: 5242711 (1993-09-01), DeNatale et al.
patent: 5244818 (1993-09-01), Jokerst et al.
patent: 5259926 (1993-11-01), Kuwabara et al.
patent: 5277749 (1994-01-01), Griffith et al.
patent: 5314772 (1994-05-01), Kozicki et al.
patent: 5318870 (1994-06-01), Hartney
patent: 5324683 (1994-06-01), Fitch et al.
patent: 5328810 (1994-07-01), Lowrey et al.
patent: 5330881 (1994-07-01), Sidman et al.
patent: 5348616 (1994-09-01), Hartman et al.
patent: 5355219 (1994-10-01), Araki et al.
patent: 5357122 (1994-10-01), Okubora et al.
patent: 5362606 (1994-11-01), Hartney et al.
patent: 5366851 (1994-11-01), Novembre
patent: 5374454 (1994-12-01), Bickford et al.
patent: 5376810 (1994-12-01), Hoenk et al.
patent: 5380474 (1995-01-01), Rye et al.
patent: 5392123 (1995-02-01), Marcus et al.
patent: 5414514 (1995-05-01), Smith et al.
patent: 5417802 (1995-05-01), Obeng
patent: 5421981 (1995-06-01), Leader et al.
patent: 5422295 (1995-06-01), Choi et al.
patent: 5424549 (1995-06-01), Feldman
patent: 5425848 (1995-06-01), Haisma et al.
patent: 5425964 (1995-06-01), Southwell et al.
patent: 5431777 (1995-07-01), Austin et al.
patent: 5439766 (1995-08-01), Day et al.
patent: 5452090 (1995-09-01), Progler et al.
patent: 5453157 (1995-09-01), Jeng
patent: 5458520 (1995-10-01), DeMercurio et al.
patent: 5468542 (1995-11-01), Crouch
patent: 5480047 (1996-01-01), Tanigawa et al.
patent: 5507411 (1996-04-01), Peckels
patent: 5512131 (1996-04-01), Kumar et al.
patent: 5515167 (1996-05-01), Ledger et al.
patent: 5527662 (1996-06-01), Hashimoto et al.
patent: 5545367 (1996-08-01), Bae et al.
patent: 5563702 (1996-10-01), Emery et al.
patent: 5566584 (1996-10-01), Briganti
patent: 5633505 (1997-05-01), Chung et al.
patent: 5654238 (1997-08-01), Cronin et al.
patent: 5669303 (1997-09-01), Maracas et al.
patent: 5670415 (1997-09-01), Rust
patent: 5700626 (1997-12-01), Lee et al.
patent: 5723176 (1998-03-01), Keyworth et al.
patent: 5724145 (1998-03-01), Kondo et al.
patent: 5725788 (1998-03-01), Maracas et al.
patent: 5731981 (1998-03-01), Simard
patent: 5736424 (1998-04-01), Prybyla et al.
patent: 5743998 (1998-04-01), Park
patent: 5747102 (1998-05-01), Smith et al.
patent: 5753014 (1998-05-01), Van Rijn
patent: 5760500 (1998-06-01), Kondo et al.
patent: 5772905 (1998-06-01), Chou
patent: 5776748 (1998-07-01), Singhvi et al.
patent: 5779799 (1998-07-01), Davis
patent: 5802914 (1998-09-01), Fassler et al.
patent: 5804474 (1998-09-01), Sakaki et al.
patent: 5808742 (1998-09-01), Everett et al.
patent: 5855686 (1999-01-01), Rust
patent: 5877036 (1999-03-01), Kawai
patent: 5877861 (1999-03-01), Ausschnitt et al.
patent: 5884292 (1999-03-01), Baker et al.
patent: 5888650 (1999-03-01), Calhoun et al.
patent: 5895263 (1999-04-01), Carter et al.
patent: 5900160 (1999-05-01), Whitesides et al.
patent: 5907782 (1999-05-01), Wu
patent: 5912049 (1999-06-01), Shirley
patent: 5926690 (1999-07-01), Toprac et al.
patent: 5942871 (1999-08-01), Lee
patent: 5948219 (1999-09-01), Rohner
patent: 5948470 (1999-09-01), Harrison et al.
patent: 5948570 (1999-09-01), Kornblit et al.
patent: 5952127 (1999-09-01), Yamanaka
patent: 5988859 (1999-11-01), Kirk
patent: 6033977 (2000-03-01), Gutsche et al.
patent: 6035805 (2000-03-01), Rust
patent: 6036055 (2000-03-01), Mogadam et al.
patent: 6038280 (2000-03-01), Rossiger et al.
patent: 6039897 (2000-03-01), Lochhead et al.
patent: 6046056 (2000-04-01), Parce et al.
patent: 6051345 (2000-04-01), Huang
patent: 6074827 (2000-06-01), Nelson et al.
patent: 6088103 (2000-07-01), Everett et al.
patent: 6091485 (2000-07-01), Li et al.
patent: 6096655 (2000-08-01), Lee et al.
patent: 6113576 (2000-09-01), Dance et al.
patent: 6117708 (2000-09-01), Wensel
patent: 6125183 (2000-09-01), Jiawook et al.
patent: 6128085 (2000-10-01), Buermann et al.
patent: 6137562 (2000-10-01), Masuyuki et al.
patent: 6143412 (2000-11-01), Schueller et al.
patent: 6150231 (2000-11-01), Muller et al.
patent: 6150680 (2000-11-01), Eastman et al.
patent: 6168845 (2001-01-01), Fontana, Jr. et al.
patent: 6180239 (2001-01-01), Whitesides et al.
patent: 6204922 (2001-03-01), Chalmers
patent: 6218316 (2001-04-01), Marsh
patent: 6234379 (2001-05-01), Donges
patent: 6245213 (2001-06-01), Olsson et al.
patent: 6245581 (2001-06-01), Bonser et al.
patent: 6274294 (2001-08-01), Hines
patent: 6309580 (2001-10-01), Chou
patent: 6316290 (2001-11-01), Wensel
patent: 6326627 (2001-12-01), Putvinski et al.
patent: 6329256 (2001-12-01), Ibok
patent: 6334960 (2002-01-01), Willson et al.
pate
Choi Byung J.
Sreenivasan Sidlgata V
Voisin Ronald D.
Watts Michael P. C.
Brooks Kenneth C.
Molecular Imprints, Inc.
Young Christopher G.
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