Alignment method for transfer and alignment device

Details Alignment method for transfer and alignment device Alignment method for transfer and alignment device

1991-08-29

1993-12-28

Burr, Edgar S.

Printing

Layout or registration

101DIG36, 101170, 101485, 33620, B41F 900

Patent

active

052729800

ABSTRACT:
While a pattern side register mark provided on a pattern transferring plate provided with a transfer pattern and a work side register mark provided on a work are optically observed by means of an observation optical system, at least one of the pattern transferring plate and a work surface plate carrying thereon the work is moved in a non-contact state in accordance with information provided by the observation optical system to effect registration between the transfer pattern and the work, so that the pattern transferring plate is pressed to the work thereby to transfer the transfer pattern onto the work.

REFERENCES:
patent: 3696738 (1972-10-01), Walker
patent: 3915090 (1975-10-01), Horst et al.
patent: 3998156 (1976-12-01), Zimmer
patent: 4604966 (1986-08-01), Kohn
patent: 4610200 (1986-09-01), Metso
patent: 4945829 (1990-08-01), Ericsson

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