Alignment method and apparatus in an exposing process

Details Alignment method and apparatus in an exposing process Alignment method and apparatus in an exposing process

1996-04-10

1997-10-28

Grimley, Arthur T.

Photocopying

Projection printing and copying cameras

Detailed holder for original

355 53, G03B 2742, G03B 2762

Patent

active

056822286

ABSTRACT:
An alignment apparatus includes holding devices for holding a photo-mask, a supporting device for supporting a substrate, a detecting device, and force-exerting devices. The photo-mask and the substrate have positioning marks, respectively. The detecting device detects positional errors between the positioning marks on the photo-mask and the positioning marks on the substrate. The force-exerting devices apply forces to a periphery of the photo-mask in accordance with the detected positional errors. When receiving forces, the photo-mask elastically deforms in its plane to move the positioning marks so that the positional errors can be corrected to predetermined values.

REFERENCES:
patent: 5144363 (1992-09-01), Wittekoek et al.
patent: 5184176 (1993-02-01), Unno et al.
patent: 5272501 (1993-12-01), Nishi et al.

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