Alignment method and apparatus and exposure apparatus

Details Alignment method and apparatus and exposure apparatus Alignment method and apparatus and exposure apparatus

2007-03-13

2007-03-13

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C716S030000

Reexamination Certificate

active

10762599

ABSTRACT:
A method for detecting disposition of plurality of exposure shot areas of an object that is to be exposed includes a first detection step of detecting the alignment marks on the object, an evaluation step of evaluating randomness of the alignment marks based on the detection result by the first detection step, a determination step of determining a number smaller than the total number of alignment marks on the object based on the evaluation result by the evaluation step, and a second detection step of detecting the disposition of the plurality of exposure shot areas by detecting alignment marks corresponding to the number determined by the determination step.

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