Alignment method and alignment system

Details Alignment method and alignment system Alignment method and alignment system

1994-02-25

1996-03-12

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With light detector

356401, 250548, 355 53, G01B 1100

Patent

active

054990998

ABSTRACT:
An alignment method and system in which substrates having zones, to be aligned and being disposed in a predetermined array, are supplied sequentially and in which in each substrate the zones are brought into alignment with a predetermined reference position sequentially. Deviations in the positions of the zones of a first substrate with respect to positions determined in accordance with the predetermined array, are measured in sequence, and the actual array of the zones through the measurement is detected. The relationship between the predetermined array and the actual array detected in the first step is determined in terms of a predetermined transformation parameter, and a transformation parameter for the first substrate effective to minimize an error, is determined. An error between the actual array and an array determined in accordance with the transformation parameter of the first substrate, is determined and stored, and with respect to the predetermined reference position, a second substrate having zones of substantially the same array as the first substrate is aligned by using the stored error as an alignment correction value.

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