Alignment method and alignment system

Details Alignment method and alignment system Alignment method and alignment system

1997-02-06

1999-11-16

Font, Frank G.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356375, 356373, 356399, G01B 1100

Patent

active

059867663

ABSTRACT:
Disclosed is an alignment method which includes measuring a deviation between a design position and a measurement position, with respect to some of plural alignment execution points upon an object, to be examined, which alignment execution points have predetermined design positions, respectively, applying design positions of some alignment execution points and measured positional deviations to an approximation formula which approximates the relation between design positions and corrected positional deviations, and determining, with respect to each alignment execution point, a correction formula for calculating a corrected positional deviation on the basis of its design position, and performing an alignment procedure to be done with respect to the alignment execution points in accordance with the determined correction formula, wherein the correction formula includes a second or higher order term of design position.

REFERENCES:
patent: 5008703 (1991-04-01), Kawakami et al.
patent: 5112133 (1992-05-01), Kurosawa et al.
patent: 5131022 (1992-07-01), Terashima et al.
patent: 5138643 (1992-08-01), Sakamoto et al.
patent: 5142156 (1992-08-01), Ozawa et al.
patent: 5150391 (1992-09-01), Ebinuma et al.
patent: 5172402 (1992-12-01), Mizusawa et al.
patent: 5182615 (1993-01-01), Kurosawa et al.
patent: 5285488 (1994-02-01), Watanabe et al.
patent: 5317615 (1994-05-01), Ebinuma et al.
patent: 5499099 (1996-03-01), Sato et al.
patent: 5543921 (1996-08-01), Uzawa et al.
patent: 5585925 (1996-12-01), Sato et al.
patent: 5726757 (1998-03-01), Kato et al.
patent: 5731113 (1998-03-01), Uono
patent: 5751404 (1998-05-01), Murakami et al.

Affiliated with

Also associated with

Rating

Alignment method and alignment system does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment method and alignment system, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment method and alignment system will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1331291