Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1994-12-20
1996-06-11
Westin, Edward P.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
2505593, 356400, G01N 2186
Patent
active
055258085
ABSTRACT:
A method of aligning each of a plurality of processing areas regularly aligned on a substrate according to designed alignment coordinates to a predetermined reference position in a static coordinate system for defining the moving position of the substrate is disclosed. The coordinate positions, on the static coordinate system, of at least three processing areas selected in advance as specific processing areas from the plurality of processing areas are measured. The coordinate positions, on the static coordinate system, of the plurality of processing areas on the substrate are determined by weighting the coordinate positions, on the static coordinate system, of the at least three specific processing areas according to the distances between a processing area of interest and each of the at least three specific processing areas in units of processing areas on the substrate, and executing a statistic calculation using the plurality of weighted coordinate positions.
REFERENCES:
patent: 4902900 (1990-02-01), Kamiya et al.
patent: 5243195 (1993-09-01), Nishi
Hirukawa Shigeru
Irie Nobuyuki
Iwamoto Yoshichika
Kaneko Ryoichi
Takane Eiji
Le Que T.
Nikon Corporaton
Westin Edward P.
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