Alignment method

Details Alignment method Alignment method

1997-03-24

1998-09-08

Teska, Kevin J.

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355 53, G06F 9455

Patent

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058058664

ABSTRACT:
An alignment method for achieving accurate alignment by accurately eliminating an isolated area with a large nonlinear component of an alignment error from sample areas. A conversion parameter is calculated by statistical processing on the basis of a result obtained by measuring the position of each sample area on a substrate to be processed in advance, and each area on the substrate is aligned on the basis of arrangement coordinate values calculated using the conversion parameter. This method relates to a method of aligning each of a plurality of areas to be processed arranged on the substrate on the basis of arrangement coordinates on a first coordinate system (x, y) set on the substrate to a predetermined process position in a second coordinate system (X, Y) for defining the moving position of the substrate.

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patent: 5502311 (1996-03-01), Imai et al.
patent: 5561606 (1996-10-01), Ota et al.
U.S. Patent Application Serial No. 08/011,697 filed on Feb. 1, 1993 by Ota et al.

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