Alignment method

Details Alignment method Alignment method

1987-03-30

1989-09-26

Tarcza, Thomas H.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

364559, 437984, G01N 2186

Patent

active

048702889

ABSTRACT:
A method of detecting a position of a wafer, including memorizing a pattern of a part of the wafer, comparing a pattern of another part of the wafer at a position which is in a predetermined positional relationship with the first part, with the memorized pattern, and detecting a rotational position of the wafer on the basis of the comparison.

REFERENCES:
patent: 4720635 (1988-01-01), Uga

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