Alignment measuring system and method of determining...

Details Alignment measuring system and method of determining... Alignment measuring system and method of determining...

2007-07-10

2007-07-10

Richards, N. Drew (Department: 2809)

Optics: measuring and testing

By alignment in lateral direction

With light detector

C356S073000

Reexamination Certificate

active

10821890

ABSTRACT:
An alignment measuring system includes a focusing diode, a light source, an image sensor, first and second splitters, and a controller. The first splitter directs a portion of light from the light source toward a wafer, and directs light returned by the wafer to the second splitter. The second splitter directs a first portion of the light toward the image sensor, and a second portion of the light toward the focusing diode, and control the ratio of the first and second portions in response to a control signal from the controller. The image sensor receives the first portion of light and produces a detection signal. The controller receives the detection signal, determines an alignment state of the wafer, and controls a stage to align and position the wafer.

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patent: 2004/0263828 (2004-12-01), Kim

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