Alignment mark, laser trimmer and semiconductor device manufactu

Details Alignment mark, laser trimmer and semiconductor device manufactu Alignment mark, laser trimmer and semiconductor device manufactu

1994-09-06

1996-06-18

Rosenberger, Richard A.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1100

Patent

active

055283721

ABSTRACT:
In a semiconductor device fabrication process, a so-called alignment mark or position-alignment mark, a laser trimmer are used. The position-alignment mark makes a considerable difference in amount between a vertically reflected laser beam light from the position-alignment mark and that from the background thereof to strengthen a contrast between the position-alignment mark and the background surrounding the mark, so that a signal-to-noise ratio (SN ratio) is considerably improved to enable a precise position alignment to be performed in the semiconductor device fabrication process. The position-alignment mark comprises: a position-detecting target having high reflectance; and a pair of low-reflectance regions which sandwich the position-detecting target therebetween.

REFERENCES:
patent: 3603728 (1971-09-01), Arimura
patent: 3660157 (1972-05-01), Villers et al.
patent: 4240094 (1980-12-01), Mader
patent: 4377028 (1983-03-01), Imahashi
patent: 4618317 (1986-10-01), Shimizu et al.
patent: 4632557 (1986-12-01), Thompson
patent: 4635345 (1987-01-01), Hankins et al.
patent: 4769523 (1988-09-01), Tanimoto et al.
patent: 4880309 (1989-11-01), Wanta
patent: 5059808 (1991-10-01), Tasui et al.

Affiliated with

Also associated with

Rating

Alignment mark, laser trimmer and semiconductor device manufactu does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment mark, laser trimmer and semiconductor device manufactu, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment mark, laser trimmer and semiconductor device manufactu will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-227055