Alignment device having irradiation and detection light correcti

Details Alignment device having irradiation and detection light correcti Alignment device having irradiation and detection light correcti

1992-05-27

1993-04-20

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356401, G01N 2186

Patent

active

052045358

ABSTRACT:
The device is of the type used for semiconductor exposure apparatus equipped with a projection lens for transferring a pattern, formed on a reticle, onto a substrate with an exposure light. The device is adapted for detecting the position of an alignment mark formed on the substrate. The device includes light irradiation means, detector, an irradiation light correcting optical element and a detection light correcting optical element. The light irradiation means irradiates the alignment mark, through the projection lens, with alignment light having a wavelength different from that of the exposure light. The detector detects, through the projection optical system, light from the alignment mark. The irradiation light correcting optical element is provided between the reticle and the substrate and adapted for deflecting the irradiation optical path so as to correct, by predetermined amount, the longitudinal chromatic aberration and the chromatic aberration of magnification of the projection optical system for the irradiation light. The detection light correcting optical element is provided between said reticle and said substrate and adapted for deflecting the detection optical path toward the peripheral part of an exposure area of said reticle, so as to correct, by a predetermined amount, the chromatic aberration of magnification of the projection optical system for the detection light.

REFERENCES:
patent: 3865483 (1975-02-01), Wojcik
patent: 4492459 (1985-01-01), Omata
patent: 4779001 (1988-10-01), Makosch
patent: 5004348 (1991-04-01), Magome

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