Alignment device for an exposure system using a CCD camera

Details Alignment device for an exposure system using a CCD camera Alignment device for an exposure system using a CCD camera

1996-09-27

1998-08-04

Font, Frank G.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

G01B 1127

Patent

active

057902577

ABSTRACT:
An alignment device for an exposure system using a CCD camera is disclosed. The alignment device includes a plurality of optical alignment systems, a screen, a prism, an image formation lens, a CCD (Charge Coupled Device) camera, an image processor, an information display, and a stage controller. The alignment device can precisely align the position of a workpiece by varying the magnification of alignment light emitted from the plurality of optical alignment systems. This is done by transmitting the light through the prism, through the zoom lens and then to the single CCD camera where an image is formed.

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patent: 5521036 (1996-05-01), Iwamoto et al.
patent: 5602620 (1997-02-01), Miyazake et al.

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