Alignment device and method with focus detection system

Details Alignment device and method with focus detection system Alignment device and method with focus detection system

1997-10-20

2000-01-18

Braun, Fred L.

Photocopying

Projection printing and copying cameras

Step and repeat

356401, G03B 2742, G01B 1100

Patent

active

060161868

ABSTRACT:
An alignment device which may include an objective optical system for detecting the light from a first mark formed, for alignment, in a first mark area on a substrate and the light from a second mark formed, for alignment, in a second mark area, a first detection optical system having a first detection area within the viewing field of the objective optical system and adapted to detect the light from the first mark through the objective optical system, a second detection optical system having a second detection area, different from the first detection area, within the viewing field of the objective optical system and adapted to detect the light from the second mark through the objective optical system, and a focus detection system for detecting the deviation of the first mark area with respect to the focal plane of the first detection optical system and the deviation of the second mark area with respect to the focal plane of the second detection optical system, by irradiating the first and second detection areas respective with light beams and receiving the reflected lights therefrom.

REFERENCES:
patent: 4710026 (1987-12-01), Magome et al.
patent: 5381210 (1995-01-01), Hagiwara
patent: 5386269 (1995-01-01), Kosugi
patent: 5416562 (1995-05-01), Ota et al.

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