Optics: measuring and testing – By alignment in lateral direction – With light detector
Reexamination Certificate
2010-03-24
2011-12-27
Stock, Jr., Gordon (Department: 2886)
Optics: measuring and testing
By alignment in lateral direction
With light detector
C356S399000, C356S614000
Reexamination Certificate
active
08085400
ABSTRACT:
An alignment device is provided for aligning a primary mirror with a secondary mirror in an optical system having the primary mirror and the secondary mirror arranged so as to face each other along the optical axis. The alignment device has a dichroic film formed on a surface on the front side of the secondary mirror and configured to reflect light used in the optical system and to transmit alignment light, a back reflecting surface formed on the back side of the secondary mirror and configured to reflect the alignment light, and a detection system which detects a positional deviation between the primary mirror and the secondary mirror, based on the alignment light having traveled via the dichroic film, the back reflecting surface, and a reflecting surface of the primary mirror.
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Miles & Stockbridge P.C.
Nikon Corporation
Stock, Jr. Gordon
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