Alignment device and method based on imaging characteristics of

Details Alignment device and method based on imaging characteristics of Alignment device and method based on imaging characteristics of

1997-09-30

1999-11-02

Kim, Robert H.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

356363, 250548, G01B 1100

Patent

active

059780940

ABSTRACT:
An alignment device includes an image pickup optical system for picking up an image of a first reference mark disposed on a mask and an image of a second reference mark disposed on a photosensitive substrate through an image pickup optical system, a memory for storing information associated with the imaging characteristics of the image pickup optical system, and a correction system for correcting the positions of the first and second reference marks, detected using image information from the image pickup system, on the basis of the information associated with the imaging characteristics of the image pickup optical system.

REFERENCES:
patent: 4780616 (1988-10-01), Nishi et al.

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