Alignment device

Details Alignment device Alignment device

1987-12-15

1988-11-15

Anderson, Bruce C.

Radiant energy

Means to align or position an object relative to a source or...

2504922, 378 34, H01J 3720

Patent

active

047851872

ABSTRACT:
An alignment device including an electron gun for emitting an electron beam, a deflecting electrode for scanningly deflecting the electron beam emitted from the electron gun, a holder for holding an object in a plane of scan, a reference mark with which the object is to be aligned, and a detector for detecting electron beams emerging from the reference mark and the object, which are irradiated by the scanning electron beam, to detect the position of each of the reference mark and the object. On the basis of result of detection by the detector, the object is displaced by a drive source, whereby it is precisely aligned with the reference mark.

REFERENCES:
patent: 3710101 (1973-01-01), O'Keeffe
patent: 3745358 (1973-07-01), Firtz
patent: 3864597 (1975-02-01), Trotel
patent: 3879613 (1975-04-01), Scott
patent: 3894271 (1975-07-01), Pfeiffer
patent: 4119854 (1978-10-01), Tanaka et al.
patent: 4370554 (1983-01-01), Bohlen et al.
patent: 4413187 (1983-11-01), Akazawa
patent: 4472824 (1984-09-01), Buckley
patent: 4578587 (1986-03-01), Behringer

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