Alignment device

Details Alignment device Alignment device

1985-03-06

1987-05-19

Evans, F. L.

Radiant energy

Luminophor irradiation

With ultraviolet source

2504581, 2504911, 356401, G01B 1100

Patent

active

046671099

ABSTRACT:
An alignment device having a light source for emitting a light beam in a ultraviolet range or in a short wavelength range to irradiate alignment marks formed on two members to be aligned with each other, and an observation system for observing an image related to the alignment marks of the two members irradiated by the light beam emitted from the light source.

REFERENCES:
patent: 3420719 (1969-01-01), Potts
patent: 3984680 (1976-10-01), Smith
patent: 4085329 (1978-04-01), McCoy et al.
patent: 4476512 (1984-10-01), Sunago et al.
patent: 4508749 (1985-04-01), Brannon et al.
Feder et al, IBM Technical Disclosure Bulletin, vol. 16, No. 4, Sep. 1973, p. 1306.
Angilello, IBM Technical Disclosure Bulletin, vol. 22, No. 6, Nov. 1979, pp. 2510, 2511.
Webster's New Collegiate Dictionary, G & C Merriam Company, Springfield, Mass., 1977, p. 664.

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