Alignment device

Details Alignment device Alignment device

1990-06-12

1991-04-02

Evans, F. L.

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

250548, 356363, G01B 1126

Patent

active

050043480

ABSTRACT:
An apparatus for aligning a mask and a substrate by detecting diffracted light from a first and second diffraction gratings. The apparatus comprises an illumination light source for irradiating light of a predetermined wavelength, a detection optical system, having an aberration along an optical axis corrected in a predetermined manner, and an orientation control device for controlling the light orientation of the predetermined wavelength.

REFERENCES:
patent: 4251160 (1981-02-01), Bouwhuis et al.
patent: 4269505 (1981-05-01), Mayer
patent: 4492459 (1985-01-01), Omata
patent: 4710026 (1987-12-01), Magome et al.

Affiliated with

Also associated with

Rating

Alignment device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-324564