Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2005-03-29
2010-06-29
Kim, Peter B (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S072000, C355S077000, C356S400000
Reexamination Certificate
active
07746446
ABSTRACT:
Alignment parameters determination method with less overlay error after exposure without tremendous expending time and cost is provided. Provision is made of a fetching unit performing position measurement and statistical processing to obtain reference computation results. Another fetching unit obtains reference processing results by positioning and exposing shots at a predetermined exposure apparatus based on the reference computation results, then measuring overlay error for the shots. Another fetching unit changes at least parts of the predetermined alignment parameters and performs position measurement and statistical processing to obtain comparative computation results. A controller650calculates estimated overlay error when assuming positioning and exposure of shots at a predetermined exposure apparatus based on the comparative computation results using the reference computation results, comparative computation results, and reference processing results.
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Kim Peter B
Nikon Corporation
Oliff & Berridge
Riddle Christina
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