Alignment check pattern for multi-level interconnection

Details Alignment check pattern for multi-level interconnection Alignment check pattern for multi-level interconnection

1992-10-01

1994-05-03

Ryan, Patrick J.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

257797, 428209, 428210, 428688, 428689, B32B 900

Patent

active

053086821

ABSTRACT:
An alignment check pattern formed by a first insulating film; a first dummy pattern formed on a surface of said first insulating film; a second insulating film formed on a composite surface of said first insulating film and said first dummy pattern; a second dummy pattern formed on said second film, and positioned directly over said first dummy pattern in plan view; a third insulating film formed on a composite surface of said second insulating film and said second dummy pattern; a regular scale pattern formed on said third insulating film, and positioned directly over said second dummy pattern; fourth insulating film formed on a composite surface of said third insulating film and said regular scale pattern; and a vernier scale pattern formed on a surface of said fourth insulating film and positioned directly over said regular scale pattern.

REFERENCES:
patent: 3863331 (1975-02-01), Schade
patent: 4423127 (1983-12-01), Fujimura
patent: 4916514 (1990-04-01), Nowak

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