Alignment apparatus for object on stage

Details Alignment apparatus for object on stage Alignment apparatus for object on stage

2006-05-30

2006-05-30

Le, Que T. (Department: 2878)

Radiant energy

Photocells; circuits and apparatus

With circuit for evaluating a web, strand, strip, or sheet

C250S559400

Reexamination Certificate

active

07053393

ABSTRACT:
An object is held on a stage of an equipment, the stage is rotated in order to acquire a detection signal corresponding to a position of an outer peripheral edge of the object, a displacement of the object with respect to an alignment reference position is obtained based on this detection signal, and the stage is subjected to movement control so as to eliminate this displacement, thereby aligning the object.

REFERENCES:
patent: 5807062 (1998-09-01), Schultz et al.
patent: 6225012 (2001-05-01), Nishi et al.
patent: 8-215876 (1996-08-01), None

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