Alignment apparatus, exposure apparatus using same, and...

Details Alignment apparatus, exposure apparatus using same, and... Alignment apparatus, exposure apparatus using same, and...

2006-09-19

2006-09-19

Smith, Zandra V. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

With registration indicia

C356S400000, C355S053000

Reexamination Certificate

active

07110116

ABSTRACT:
An alignment apparatus for aligning a reflective reticle includes a light source for emitting alignment light, an optical alignment mark provided on the reticle, and a reference mark provided on a reticle stage that holds the reticle. A detecting unit detects the alignment light reflected from the alignment mark and the reference mark, and the reticle is aligned on the basis of the result of detection by the detection unit.

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