Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2007-06-12

2010-06-15

Berman, Jack I (Department: 2881)

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

C250S442110, C355S053000, C355S072000, C310S012060, C310S012310, C310S015000, C318S135000

Reexamination Certificate

active

07737419

ABSTRACT:
At least one exemplary embodiment is directed to an alignment apparatus which includes a moving member, a structural object arranged on the moving member, and an electromagnetic actuator which moves the structural object relative to the moving member. The electromagnetic actuator includes a plurality of linear motor units, which apply forces in the horizontal direction and the vertical direction to the structural object. The plurality of linear motor units apply, to the structural object, forces in the rotation direction about each of two axes orthogonal to each other in the horizontal plane and the rotation direction about the axis in the vertical direction.

REFERENCES:
patent: 4654571 (1987-03-01), Hinds
patent: 4705951 (1987-11-01), Layman et al.
patent: 6097114 (2000-08-01), Hazelton
patent: 6452292 (2002-09-01), Binnard
patent: 6618120 (2003-09-01), Ueta
patent: 2001203140 (2001-07-01), None
patent: 2003022960 (2003-01-01), None

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