Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2007-10-26

2008-12-02

Rutledge, Della J. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C355S075000, C310S010000, C310S012060

Reexamination Certificate

active

07460213

ABSTRACT:
An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement light, and a discharging unit to discharge gas existing in an optical path of the measurement light. The discharging unit is provided to the stator.

REFERENCES:
patent: 5959732 (1999-09-01), Hara et al.
patent: 6407799 (2002-06-01), Hara
patent: 2002/0015139 (2002-02-01), Hara
patent: 2002/0018195 (2002-02-01), Iwamoto et al.
patent: 2003/0030779 (2003-02-01), Hara
patent: 2004/0218158 (2004-11-01), Nishi
patent: 2005/0083496 (2005-04-01), Dansberg et al.
patent: 2005/0105067 (2005-05-01), Chibana
patent: 2002-008971 (2002-01-01), None
Jun. 28, 2007 United States Patent and Trademark Office Action issued in U.S. Appl. No. 11/347,037.

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