Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2007-10-16

2007-10-16

Leykin, Rita (Department: 2837)

Electricity: motive power systems

Linear-movement motors

C318S038000, C318S034000, C318S687000, C318S592000, C318S593000, C074S490090, C074S490130, C414S749200, C269S071000, C269S073000, C108S137000, C108S143000

Reexamination Certificate

active

11342040

ABSTRACT:
An alignment apparatus which moves a object comprises a first structure having a holding member which holds the object, a second structure having a magnet which constitutes a linear motor, the linear motor drives the first and second structure, and a flow passage formed between the holding member and the magnet.

REFERENCES:
patent: 5623853 (1997-04-01), Novak et al.
patent: 5703420 (1997-12-01), Kamata et al.
patent: 6762516 (2004-07-01), Maruyama
patent: 6810298 (2004-10-01), Emoto
patent: 6873404 (2005-03-01), Korenaga
patent: 6885430 (2005-04-01), Tanaka et al.
patent: 6958808 (2005-10-01), Tanaka et al.
patent: 6992755 (2006-01-01), Kubo
patent: 7064804 (2006-06-01), Emoto
patent: 7106414 (2006-09-01), Tsuji et al.
patent: 7116396 (2006-10-01), Tsuji et al.
patent: 2001/0055102 (2001-12-01), Emoto
patent: 2003/0007140 (2003-01-01), Korenaga
patent: 2003/0098962 (2003-05-01), Kubo
patent: 2005/0088634 (2005-04-01), Kosugi et al.
patent: 2005/0140959 (2005-06-01), Tsuji et al.
patent: 2003-022960 (2003-01-01), None
patent: 2003-163257 (2003-06-01), None
patent: 2004-254489 (2004-09-01), None

Affiliated with

Also associated with

Rating

Alignment apparatus, exposure apparatus, and device... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment apparatus, exposure apparatus, and device..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment apparatus, exposure apparatus, and device... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3882894