Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2007-11-20

2007-11-20

Rutledge, D. (Department: 2851)

Photocopying

Projection printing and copying cameras

Detailed holder for photosensitive paper

C356S498000, C356S500000

Reexamination Certificate

active

11347037

ABSTRACT:
An alignment apparatus includes driving means having a movable element and a stator, a measurement unit which measures a position of a moving member moved by the driving means using measurement light, and a discharging unit to discharge gas existing in an optical path of the measurement light. The discharging unit is provided to the stator.

REFERENCES:
patent: 5959732 (1999-09-01), Hara
patent: 6407799 (2002-06-01), Hara
patent: 2002/0008971 (2002-01-01), McKenna
patent: 2002/0015139 (2002-02-01), Hara
patent: 2002-008971 (2002-01-01), None

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