Alignment apparatus, exposure apparatus, and device...

Details Alignment apparatus, exposure apparatus, and device... Alignment apparatus, exposure apparatus, and device...

2006-12-05

2006-12-05

Nguyen, Henry Hung (Department: 2851)

Photocopying

Projection printing and copying cameras

Focus or magnification control

C355S072000, C355S075000

Reexamination Certificate

active

07145638

ABSTRACT:
A position measurement unit measures the position of an object to be position controlled. A microprocessor performs a plurality of types of operations on the basis of the obtained position signal and outputs the operation result as a control signal that pertains to position control of the object to be position controlled. The microprocessor performs a difference operation, which calculates the difference signal of the position signal at the first sampling frequency and performs operations other than difference operation at the second sampling frequency lower than the first sampling frequency.

REFERENCES:
patent: 5877845 (1999-03-01), Makinouchi
patent: 6285444 (2001-09-01), Osanai et al.
patent: 6495847 (2002-12-01), Asano et al.
patent: 2003/0234939 (2003-12-01), Kurosawa
patent: 6-165552 (1994-06-01), None

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