Alignment apparatus employing a laser light scatterer

Details Alignment apparatus employing a laser light scatterer Alignment apparatus employing a laser light scatterer

1989-11-13

1991-06-18

Turner, Samuel

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356363, G01B 902

Patent

active

050245287

ABSTRACT:
Alignment apparatus including a source of coherent radiation mounted in a reference location and arranged to provide an output beam extending along a reference axis, a laser light reflector mounted at a location sought to be aligned with respect to the reference location and/or the reference axis, a laser light scatterer arranged to receive reflected laser light from the reflector and to produce a speckle pattern and a detector arranged to sense the speckle pattern produced by the laser light scatterer in response to incident reflected laser light, whereby variations in the speckle pattern indicate changes in relative orientation between the reference location and the laser light reflector.

REFERENCES:
"Basic Physical Principles of Defocused Speckle Photography; a Tilt Topology Inspection Technique", Gregory, Opitcs & Laser Tech., 10-1976, pp. 201-213.
Freund, I. et al., "Momory Effects in Propagation of Optical Waves Through Disordered Media", Physical Rev. Letters, vol. 61, 20, 1988, pp. 2328-2331.

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