Alignment apparatus, and exposure apparatus with the alignment a

Details Alignment apparatus, and exposure apparatus with the alignment a Alignment apparatus, and exposure apparatus with the alignment a

1998-04-16

2000-05-16

Metjahic, Safet

Photocopying

Projection printing and copying cameras

Step and repeat

355 72, G03B 2742, G03B 2758

Patent

active

060644672

ABSTRACT:
An alignment apparatus, which includes a stage which is supported by compressed fluid ejected from a bearing pad in a non-contact state from a translation drive guide, a linear motor serving as a driving device of the stage, position detectors for detecting the position of the stage, and a controller for aligning the stage on the basis of a position signal detected by the position detectors, attains high alignment precision by including a plurality of gap driving devices for changing the support force of the stage by varying the bearing gap of the stage, a plurality of displacement detectors for detecting any displacements of the bearing gap, and a controller for controlling any rotational vibration produced upon driving the stage by combining alignment control for synchronously controlling the linear motor and control for the support force by the bearing gap driving device, on the basis of signals detected by the position detectors of the stage and the displacement detectors for detecting the displacements of the bearing gap.

REFERENCES:
patent: 5382095 (1995-01-01), Akutsu
patent: 5684856 (1997-11-01), Itoh et al.
patent: 5726548 (1998-03-01), Chiba et al.
patent: 5858587 (1999-01-01), Yamane et al.
patent: 5864389 (1997-11-01), Osanai et al.

Affiliated with

Also associated with

Rating

Alignment apparatus, and exposure apparatus with the alignment a does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Alignment apparatus, and exposure apparatus with the alignment a, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Alignment apparatus, and exposure apparatus with the alignment a will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-263421