Alignment apparatus and exposure apparatus using the same

Electrical generator or motor structure – Dynamoelectric – Linear

Reexamination Certificate

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Reexamination Certificate

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11444441

ABSTRACT:
An alignment apparatus which generates a driving force between a plate-like movable element and a stator facing the movable element to control alignment of the movable element. The apparatus includes movable element magnets which are arrayed in a plate-like plane of the movable element in accordance with an array cycle and are magnetized in predetermined directions, stator coils which are arrayed at intervals corresponding to the array cycle, and a current controller which supplies control currents having phase differences to each pair of adjacent ones of said stator coils to generate a driving force for driving the movable element between the movable element magnets and the stator coils facing the movable element magnets.

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