Alignment apparatus

Details Alignment apparatus Alignment apparatus

1995-01-06

1995-12-19

Gellner, Michael L.

Photocopying

Projection printing and copying cameras

Illumination systems or details

355 53, 355 68, 356401, G01B 1100

Patent

active

054773091

ABSTRACT:
In an alignment apparatus for irradiating detection laser beams LB1 and LB2 to an alignment mark and detecting a position of a wafer 1 by using a light produced from the alignment mark, a width d of a recess 2b of the alignment mark along an alignment direction is set to be smaller than a length (.lambda.+c) which is larger than a wavelength A of the laser beams LB1 and LB2 by a predetermined amount c, to thereby provide an alignment apparatus in which it is hard to create a detection error even if the alignment mark is asymmetric.

REFERENCES:
patent: 4962318 (1990-10-01), Nishi
patent: 5151750 (1992-09-01), Magome et al.

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