Alignment apparatus

Details Alignment apparatus Alignment apparatus

2005-11-07

2010-12-07

DeCady, Albert (Department: 2121)

Data processing: generic control systems or specific application

Generic control system, apparatus or process

Digital positioning

C700S057000, C700S114000

Reexamination Certificate

active

07848832

ABSTRACT:
To be able to restrain a height of a machine even when the machine is large-sized and smoothly move a table in XYθ directions.An alignment apparatus includes two translational freedom degree guide portion (13), one rotational freedom degree guide portion (12), a translational drive/translational/rotational freedom degree mechanism module (6) including a linear motor provided at one of the translational freedom degree guide portion (13), a machine base portion (7), a reference generator portion (8), a two-dimensional position sensor (9), a calculating portion of compensation value (10). At least three of the translational drive/translational/rotational freedom degree mechanism modules (6) are uniformly arranged to a table (4).

REFERENCES:
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patent: 2004/0130690 (2004-07-01), Koren et al.
patent: 2005/0203664 (2005-09-01), Schauer et al.
patent: 2009/0152785 (2009-06-01), Komiya et al.
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patent: 8-099243 (1996-04-01), None
patent: 10-043978 (1998-02-01), None
patent: 11-245128 (1999-09-01), None
patent: 2002-328191 (2002-11-01), None

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