Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-09-25
2007-09-25
Chowdhury, Tarifur (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
Reexamination Certificate
active
10689525
ABSTRACT:
An alignment apparatus10comprises a table11which is provided rotatably in a plane, and equipped with a loading plane12A capable of sucking a wafer W, a shift mechanism30that moves the table11in the X- and Y-axis directions, and a sensor50that detects the position of the peripheral edge of the wafer W. The loading plane12A is provided so as to come to a position inside the periphery of the wafer W. On the other hand, outside the table11, a receiving member15, which is positioned on the generally same plane as the loading plane12A, is provided, and the receiving member15is provided with a plane configuration larger than the wafer W.
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Akanbi Isiaka O.
Chowdhury Tarifur
Lintec Corporation
Westerman, Hattori, Daniels & Adrian , LLP.
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