Alignment apparatus

Details Alignment apparatus Alignment apparatus

1979-02-23

1981-06-23

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Photocell controls its own optical systems

356401, G01N 2186

Patent

active

042753066

ABSTRACT:
An alignment apparatus in which alignment marks on a mask and a wafer for producing a semiconductor circuit element are photoelectrically read and the positional deviation between the two alignment marks is detected and one of the mask and the wafer is parallel-moved in accordance with the detected amount to align the mask and wafer into a predetermined positional relation. This apparatus has the function of correcting any interval error which may be present between the alignment marks.

REFERENCES:
patent: 4070117 (1978-01-01), Johannsmeier et al.
patent: 4127777 (1978-11-01), Binder

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