Radiant energy – Photocells; circuits and apparatus – Photocell controls its own optical systems
Patent
1979-02-23
1981-07-14
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Photocell controls its own optical systems
356401, G01N 2186
Patent
active
042788935
ABSTRACT:
An alignment apparatus by which two points on a first standard line on a first workpiece may be aligned in two regions having as the centers two standard points on a second standard line on a second workpiece optically opposed to the first workpiece and having predetermined areas. The two regions are diamond-shaped. By this, it is possible to reduce the alignment error of the first and second workpieces.
REFERENCES:
patent: 4070117 (1978-01-01), Johannsmeier et al.
patent: 4127777 (1978-11-01), Binder
Hiraga Ryozo
Kano Ichiro
Kato Yuzo
Ogino Yasuo
Suzuki Akiyoshi
Canon Kabushiki Kaisha
Nelms David C.
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