Electricity: motive power systems – Positional servo systems – 'reset' systems
Patent
1996-04-09
2000-02-15
Martin, David
Electricity: motive power systems
Positional servo systems
'reset' systems
318649, 318652, 364157, 364162, G65B 1142
Patent
active
060256885
ABSTRACT:
An apparatus for moving a stage, supported by a base, to a target position. The apparatus includes a motor for driving the stage in X and Y directions, a laser interferometer for measuring a current position of the stage in the X and Y directions and a controller for generating a control signal for controlling the motor to move the stage to the target position in the X and Y directions on the basis of the target position and for dynamically setting a transfer function associated with generation of the control signal in correspondence with the current measured position. The controller sets the transfer function so that a gain decreases as the stage moves toward a peripheral portion of the base.
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Canon Kabushiki Kaisha
Martin David
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