Alignment and exposure apparatus and method for manufacture of i

Details Alignment and exposure apparatus and method for manufacture of i Alignment and exposure apparatus and method for manufacture of i

1990-06-25

1991-09-17

Dixon, Joseph L.

Boots, shoes, and leggings

382 8, 356400, 356152, 358101, G06F 1546, H04N 718

Patent

active

050501119

ABSTRACT:
An alignment apparatus includes a first off-axis alignment optical system having a magnification, and a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, wherein the apparatus is operable in a global alignment mode using the second off-axis alignment optical system. In another aspect, an alignment apparatus includes a first off-axis alignment optical system having a magnification, a second off-axis alignment optical system having a magnification higher than that of the first off-axis alignment optical system, and a TTL alignment optical system, wherein the alignment apparatus is operable in a global alignment mode using the second off-axis alignment optical system and is operable in another global alignment mode using the TTL optical alignment system.

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