Photocopying – Projection printing and copying cameras – Identifying – composing – or selecting
Patent
1994-03-21
1995-01-31
Rutledge, D.
Photocopying
Projection printing and copying cameras
Identifying, composing, or selecting
355 53, G03B 2752
Patent
active
053862694
ABSTRACT:
An exposure apparatus including a wafer holder for holding a wafer, a movable wafer stage for carrying thereon the wafer holder, a recording layer provided on the wafer holder, and a detector for detecting a predetermined pattern recorded in a portion of the recording layer.
REFERENCES:
patent: 4640619 (1987-02-01), Edmark, III
patent: 4741622 (1988-05-01), Sawa et al.
patent: 4861162 (1989-08-01), Ina
patent: 4875076 (1989-10-01), Torigoe et al.
patent: 5140366 (1992-08-01), Shiozawa et al.
Canon Kabushiki Kaisha
Rutledge D.
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