Alignment and exposure apparatus

Details Alignment and exposure apparatus Alignment and exposure apparatus

1994-03-21

1995-01-31

Rutledge, D.

Photocopying

Projection printing and copying cameras

Identifying, composing, or selecting

355 53, G03B 2752

Patent

active

053862694

ABSTRACT:
An exposure apparatus including a wafer holder for holding a wafer, a movable wafer stage for carrying thereon the wafer holder, a recording layer provided on the wafer holder, and a detector for detecting a predetermined pattern recorded in a portion of the recording layer.

REFERENCES:
patent: 4640619 (1987-02-01), Edmark, III
patent: 4741622 (1988-05-01), Sawa et al.
patent: 4861162 (1989-08-01), Ina
patent: 4875076 (1989-10-01), Torigoe et al.
patent: 5140366 (1992-08-01), Shiozawa et al.

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