Alignment and exposure apparatus

Details Alignment and exposure apparatus Alignment and exposure apparatus

1985-02-14

1987-06-02

Hix, L. T.

Photocopying

Projection printing and copying cameras

Step and repeat

355 77, 356400, G03B 2742

Patent

active

046698671

ABSTRACT:
An alignment and exposure apparatus in which sequential operations of pattern projection for projecting a pattern of a first object, at a reduced ratio, onto a second object through an optical system, stepwise movement for moving the second object stepwise relative to the first object, detection for detecting any positional deviation between the first and second objects at a position at which the stepwise movement of the second object is terminated, and correction for correcting the positional relation between the first and second objects on the basis of the detected positional deviation, are repeated relative to the second object to thereby print the patterns onto the second object in a reduced scale. Upon correction of the positional relation between the first and second objects, at least one of the first and second objects is displaced in accordance with the magnitude of the detected positional deviation and/or, upon stepwise movement of the second object, the amount of stepwise movement to be made is corrected in accordance with the detected positional deviation with respect to the position at which the preceding stepwise movement of the second object is terminated. By this, the time required for repetitions of exposures is reduced.

REFERENCES:
patent: 4057347 (1977-11-01), Moriyama et al.
patent: 4110762 (1978-08-01), Tigreat
patent: 4153371 (1979-05-01), Koizumi et al.
patent: 4362385 (1982-12-01), Lobach
patent: 4553834 (1985-11-01), Ayata et al.

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