Geometrical instruments – Area integrators – Electrical
Patent
1983-10-18
1986-01-14
Stearns, Richard R.
Geometrical instruments
Area integrators
Electrical
33 1M, 33DIG2, G01B 524
Patent
active
045638209
ABSTRACT:
An aligning system for aligning a first object and second object with each other by moving them as a unit through a fluid bearing is adapted to accomplish a coarse alignment by displacing the first and second objects relative to each other and to attain a fine alignment by controlling the supply of pressure to the fluid bearing.
REFERENCES:
patent: 3231319 (1966-01-01), Porath
patent: 3736818 (1973-06-01), Ennis
patent: 3744902 (1973-07-01), Henker
patent: 3813789 (1974-06-01), Shelton
patent: 3831283 (1974-08-01), Pagella et al.
patent: 4414749 (1983-11-01), Johannsmeier
Canon Kabushiki Kaisha
Stearns Richard R.
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