Optics: measuring and testing – By alignment in lateral direction – With registration indicia
Reexamination Certificate
2007-05-01
2007-05-01
Lauchman, Layla G. (Department: 2877)
Optics: measuring and testing
By alignment in lateral direction
With registration indicia
C355S053000, C430S022000
Reexamination Certificate
active
10178234
ABSTRACT:
A method of selecting alignment marks, to be detected, from a plurality of alignment marks formed on a substrate includes the step of calculating a deviation between a distance of a designed position of an alignment mark from a reference position and a reference value, with respect to each of the plurality of alignment marks. The alignment marks, to be detected, are selected based on the deviations.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Lauchman Layla G.
Stock, Jr. Gordon J.
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