Aligning method, exposure method, exposure apparatus, and...

Optics: measuring and testing – By alignment in lateral direction – With registration indicia

Reexamination Certificate

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C355S053000, C430S022000

Reexamination Certificate

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10178234

ABSTRACT:
A method of selecting alignment marks, to be detected, from a plurality of alignment marks formed on a substrate includes the step of calculating a deviation between a distance of a designed position of an alignment mark from a reference position and a reference value, with respect to each of the plurality of alignment marks. The alignment marks, to be detected, are selected based on the deviations.

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patent: 63-232325 (1988-09-01), None

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