Aligning apparatus with a coarse/fine movement controller and an

Details Aligning apparatus with a coarse/fine movement controller and an Aligning apparatus with a coarse/fine movement controller and an

1990-03-06

1991-11-05

Turner, Samuel

Optics: measuring and testing

By alignment in lateral direction

With light detector

356358, 250572, G01B 1114

Patent

active

050627120

ABSTRACT:
A coarse/fine movement aligning apparatus of this invention includes a coarse movmeent driver for coarsely moving an object to be aligned, a fine adjustment for finely adjusting the object to be aligned, a position detector for detecting the position of the object to be aligned, a coarse/fine movement controller for selectively and simultaneously operating the coarse movment driver and the fine adjustment on the basis of a difference between the detection position obtained by the position detector and the target position of the object to be aligned, and an ultrafine movement controller for ultrafinely operating the fine adjustment to cause the object to be aligned to coincide with the target position.

REFERENCES:
patent: 4378709 (1983-04-01), Chitayat
patent: 4563820 (1986-01-01), Isohata
patent: 4590380 (1986-05-01), Tamaki
patent: 4654571 (1987-03-01), Hinds
patent: 4676649 (1987-06-01), Phillips
patent: 4971445 (1990-11-01), Sato et al.

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