Aligning apparatus, exposure apparatus, and device...

Details Aligning apparatus, exposure apparatus, and device... Aligning apparatus, exposure apparatus, and device...

2006-07-11

2006-07-11

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Dynamoelectric

Linear

C310S090500

Reexamination Certificate

active

07075197

ABSTRACT:
An aligning apparatus includes a moving member, a magnetic member arranged vertically above the moving member, a stator unit which is arranged vertically below the moving member and has a plurality of coreless coils, a first magnet unit which is provided to the moving member and generates a force with the magnetic member, and a second magnet unit which is provided to the moving member and generates a force with the stator unit. The aligning apparatus has no coils between the magnetic member and the moving member.

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